Load Port Module: The Essential Link Between Wafer..

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Load Port Module: The Essential Link Between Wafer Transport System and Process Tool | # Load Port Module # Semiconductor Industry # Manufacturing # Automation # Material Handling # Robotics # Semiconductor Equipment # Integrated Systems # Industrial Technology # Port Logistics # Container Handling

Load Port Module: The Essential Link Between Wafer Transport System and Process Tool

A programmable logic controller and touchscreen interface provide autonomous or manual control of all load port functions

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34 w

Load Port Module: The Essential Link Between Wafer Transport System and Process Tool

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